Paper Presentation & Seminar Topics: microelectromechanical systems (MEMS)

microelectromechanical systems (MEMS)

Abstract : (Seminar) Micromachining and micro electro mechanical systems (MEMS) technologies can be used to produce complex structure, devices, and systems on the scale of micrometres. MEMS is the integration of mechanical elements, sensors, actuators and electronics on a common silicon substrates through microfabrification technology. MEMS is an enabling technology allowing the development of smart products, augmenting the computational ability of microelectronics with the perception and control capabilities of microsensors and microactuators and expanding the space of possible designs and applications. There are numerous possible applications for MEMS. As a breakthrough technology, allowing unparalled synergy between previously unrelated fields such as biology and microelectronics, many new MEMS applications will emerge, expanding beyond that which is currently identified or known. This paper reviews the scope of technology and the application it addresses. It includes a short analysis of future opportunities. This paper also describes the micromachining techniques used in the fabrication of MEMS.
Keywords:Micromachining, Microsystems, Piezoelectric actuation, Electrostatic actuation, Thermal actuation, Magnetic- actuation.
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